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2021-07-06
A Terahertz Direct Detector in 22nm FD-SOI CMOS
This paper reports on the design and characterization of a CMOS based direct terahertz detector in an advanced 22nm FD-SOI technology. The nFET detector is implemented with an on-chip ring antenna fully compliant with the technology density rules. At 0.855 THz, a maximum optical responsivity and a minimum…