General information:

Belongs to:
Spatial atomic layer deposition of electrically (non-)conductive gas diffusion barriers
Filespace created on:
06.09.2018 10:02:37
Files changed on:
06.09.2018 10:02:46
Size:
8.67 MB in one file (Download all files as ZIP archive)
File type:
PDF
Main file:
de1806.pdf
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Filename/MD5 Checksum:ZIP:Last change:Size:File type:
de1806.pdf
69ffa027f1152270854ca39d589f568c		ZIP06.09.18 10:02:388.67 MBPDF